Display substrate and method of manufacturing the same

Abstract

A display substrate includes a base substrate, a gate pattern, an active pattern and a data metal pattern. The gate pattern includes a gate electrode on the base substrate. The active pattern overlaps the gate electrode and includes a first active layer, a second active layer and a third active layer. The first active layer includes first amorphous silicon (a-Si:H). The second active layer is disposed on the first active layer and includes second amorphous silicon of which a concentration of hydrogen is higher than that of the first amorphous silicon. The third active layer is disposed on the second active layer and includes third amorphous silicon of which a concentration of hydrogen is substantially the same as that of the first amorphous silicon. The data metal pattern is disposed on the active pattern and includes source and drain electrodes spaced apart from each other.

Dependencies are inferred from the claim text.