One time programmable non-volatile memory
AssigneeeMemory Technology Inc.
InventorTe-Hsun Hsu
Life of this patent
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Abstract
A one time programmable (OTP) non-volatile memory including a substrate, a switch device and a fuse structure is provided. The switch device is disposed on the substrate. The fuse structure includes a conductive layer, a spacer and a plug. The conductive layer is coupled to a terminal of the switch device. The spacer is disposed on a sidewall of the conductive layer. The plug is disposed on the conductive layer and covers the spacer. An overlap area of an overlap portion between the plug and a top surface of the conductive layer is smaller than a top view area of the plug.
Claims20
A one time programmable non-volatile memory, comprising:
- a substrate;
- a switch device, disposed on the substrate;
- and
- a fuse structure comprising:
- a conductive layer, coupled to a terminal of the switch device;
- a spacer, disposed on a sidewall of the conductive layer;
- and
- a plug, disposed on the conductive layer and covering the spacer, wherein an overlap area of an overlap portion between the plug and a top surface of the conductive layer is smaller than a top view area of the plug.
Dependencies are inferred from the claim text.