Passing access line structure in a memory device
AssigneeMicron Technology, Inc.
InventorsSrinivas Pulugurtha, Sourabh Dhir, Rajesh N. Gupta, Sanh D. Tang, Si-Woo Lee, Haitao Liu
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Abstract
A method for memory device fabrication includes forming a plurality of continuous fins on a substrate. An insulator material is formed around the fins. The continuous fins are etched into segmented fins to form exposed areas between the segmented fins. An insulator material is formed in the exposed areas wherein the insulator material in the exposed areas is formed higher than the insulator material around the fins. A metal is formed over the fins and the insulator material. The metal formed over the exposed areas is formed to a shallower depth than over the fins.
Claims23
A method for fabricating a memory device, the method comprising:
- forming a plurality of continuous fins on a substrate;
- forming an insulator material around the fins;
- segmenting the continuous fins into segmented fins to form exposed areas between the segmented fins;
- forming the insulator in the exposed areas wherein the insulator in the exposed areas is formed higher than the insulator material around the fins;
- and
- forming a metal over the fins and the insulator material.
A method for fabricating a memory device, the method comprising:
- forming a plurality of continuous fins on a substrate;
- forming a first insulator material over the fins;
- etching the first insulator to a first height that is less than a fm height;
- forming sections of an etch resist over adjacent pairs of the fins, the etch resist leaving exposed portions of the continuous fins, the adjacent pairs of fins separated by a saddle region;
- performing an active chop process on the exposed portion to generate segmented fins separated by exposed areas;
- forming the first insulator between the sections of the etch resist and into the exposed areas;
- etching the first insulator to a second height;
- forming a second insulator into the saddle regions;
- and
- forming a metal over the fins and the insulator material.
A memory system comprising:
- a controller to control the system;
- and
- a memory device, coupled to the controller, the memory device comprising:
- a substrate including a plurality of segmented fins, the fm segments separated by exposed areas;
- an insulator material formed around the fins and in the exposed areas, wherein the insulator material is formed to a greater height in the exposed areas than around the fins;
- and
- a metal formed over the fins and the insulator material, wherein the metal is formed to a shallower depth over the exposed areas.
Dependencies are inferred from the claim text.