Techniques for tiling arrays of pixel elements and fabricating hybridized tiles
AssigneeSanta Barbara Infrared, Inc.
InventorJoseph Donald LaVeigne
Life of this patent
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AssigneeSanta Barbara Infrared, Inc.
InventorJoseph Donald LaVeigne
Estimating the term…
A first substrate having an array of emitters or detectors may be joined by bump bonding with a second substrate having read-in (RIIC) or read-out (ROIC) circuitry. After the two substrates are joined, the resulting assembly may be singulated to form sub-arrays such as tiles sub-arrays having pixel elements which may be arranged on a routing layer or carrier to form a larger array. Edge features of the tiles may provide for physical alignment, mechanical attachment and chip-to-chip communication. The pixel elements may be thermal emitter elements for IR image projectors, thermal detector elements for microbolometers, LED-based emitters, or quantum photon detectors such as those found in visible, infrared and ultraviolet FPAs (focal plane arrays), and the like.
Method of fabricating and assembling a plurality of tiles having pixel elements to form a large array, comprising:
A hybridized array of pixels comprising:
A hybridized array of semiconductor elements and control circuitry comprising:
A method of making a hybridized array of semiconductor elements and control circuitry comprising:
Dependencies are inferred from the claim text.