Bonding sheet and manufacturing method thereof, and heat dissipation mechanism and manufacturing method thereof
AssigneeFujitsu Limited
InventorAkio KAWABATA
Life of this patent
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Abstract
A CNT-metal composite structure is formed by forming a plurality of CNTs which stand side by side from a base substance, forming a sheet-shaped support film which covers upper ends of the CNTs, and filling gaps each present between adjacent ones of the CNTs with a metal. By this structure, highly reliable bonding sheet and heat dissipation mechanism which are very excellent in heat dissipation efficiency, and manufacturing methods of these are realized.
Claims15
A bonding sheet comprising:
- a sheet-shaped support film;
- a plurality of carbon nanotubes which stand side by side, with one end of each being connected to a surface of the support film;
- and
- a metal which fills gaps each present between adjacent ones of the carbon nanotubes.
A heat dissipation mechanism comprising:
- a heat dissipation body;
- and
- a bonding sheet which is bonded to a surface of the heat dissipation body, the bonding sheet comprising:
- a plurality of carbon nanotubes which stand side by side, with a tip of each being connected to the surface of the heat dissipation body;
- and
- a metal which fills gaps each present between adjacent ones of the carbon nanotubes.
A manufacturing method of a bonding sheet, the method comprising:
- forming a plurality of carbon nanotubes which stand side by side from a base substance;
- forming a sheet-shaped support film which covers upper ends of the carbon nanotubes;
- and
- filling gaps each present between adjacent ones of the carbon nanotubes with a metal.
A manufacturing method of a bonding sheet, the method comprising:
- growing pieces of vertical graphene which stand in a direction vertical to a surface of a base substance and are densely superimposed on one another, and subsequently growing a plurality of carbon nanotubes standing side by side whose upper ends are connected to lower ends of the pieces of vertical graphene;
- and
- filling gaps each present between adjacent ones of the carbon nanotubes with a metal.
A manufacturing method of a heat dissipation mechanism, the method comprising:
- forming a plurality of carbon nanotubes which stand side by side from a base substance;
- filling gaps each present between adjacent ones of the carbon nanotubes with a metal in a state where tips of the carbon nanotubes abut on a surface of a heat dissipation body;
- and
- heat-treating the carbon nanotubes and the metal.
Dependencies are inferred from the claim text.