Substrate storage container
AssigneesShin-Etsu Polymer Co., Ltd., Miraial Co., Ltd.
InventorYuta KANAMORI
Life of this patent
Estimating the term…
Abstract
A handling member includes: a substantially plate-like handling member main body that is arranged along a pair of the side walls, respectively; a circular position-restriction through hole that is formed to extend through the handling member main body in a thickness direction of the handling member and with which the semicircular convex portion can be engaged; a handling member side guided portion that is engaged with the guide members and of which a movement is guided between the mounting position and the detachment position by the guide members; and a back-side guided portion that can be engaged with the back-side engaging portion by a movement of the handling member from the detachment position to the mounting position.
Claims7
1-6. (canceled)
A substrate storing container comprising:
- a container main body including a tubular wall portion with a container main body opening portion formed at one end and the other end closed, the wall portion having a back wall, an upper wall, a lower wall, and a pair of side walls, the container main body opening portion being formed by one end of the upper wall, one end of the lower wall, and one end of the side walls, wherein a substrate storing space that can store a plurality of substrates and is in communication with the container main body opening portion is formed by an inner face of the upper wall, an inner face of the lower wall, inner faces of the side walls, and an inner face of the back wall;
- a lid body that is removably attached to the container main body opening portion and can close the container main body opening portion;
- and
- a pair of the handling members that is arranged to face outer faces of the pair of the side walls, respectively, and can move between a mounting position and a detachment position along the side wall, wherein a pair of the handling members is fixed to be mounted to the side walls by moving to the mounting position and is detached from the side walls by moving to the detachment position,
- wherein the side wall includes:
- a semicircular convex portion in semicircular shape that is configured so that a projection amount becomes greater gradually as the semicircular convex portion projects from the side wall in a direction distancing from the outer face of the side wall, and approaches the mounting position from the detachment position;
- a guide member that movably guides the handling member between the mounting position and the detachment position;
- and a back side engaging portion that is formed at a back side of a pair of the side walls,
- wherein a portion at which a projection amount of the semicircular convex portion is a minimum is located at a position which is the closest to the detachment position of the semicircular convex portion, and a portion at which a projection amount of the semicircular convex portion is a maximum is located at a position which is the closest to the mounting position of the semicircular convex portion,
- wherein the handling member includes:
- a substantially plate-like handling member main body that is arranged along a pair of the side walls, respectively;
- a circular position-restriction through hole that is formed to extend through the handling member main body in a thickness direction of the handling member and with which the semicircular convex portion can be engaged;
- a handling member side guided portion that is engaged with the guide member and of which a movement is guided between the mounting position and the detachment position by the guide member;
- and a back side guided portion that can be engaged with the back side engaging portion by a movement of the handling member from the detachment position to the mounting position, and
- wherein engagement of the handling member side guided portion with the guide member and engagement of the back side guided portion with the back side engaging portion allows the handling member to be fixed in a manner of being not movable in an upper/lower direction with respect to the side wall, and engagement of the semicircular convex portion with the position-restriction through hole allows the handling member to be fixed in a manner of being not movable in a movement direction that connects the mounting position with the detachment position with respect to the side wall.
Dependencies are inferred from the claim text.