Method of fabricating zinc oxide nanostructures using liquid masking layer
AssigneeGwangju Institute of Science and Technology
InventorsHeung-Cho KO, Hun-Soo JANG, Gun-Young JUNG, Bokyeong SON, Hui SONG
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Abstract
A method of preparing zinc oxide nanostructures using a liquid masking layer is disclosed. The method includes preparing a substrate having a zinc oxide seed layer formed thereon; loading the substrate in a reactor in which a lower liquid masking layer, a precursor liquid layer for hydrothermal growth, and an upper liquid masking layer are disposed in order; and forming zinc oxide nanostructures in a pattern on the substrate through hydrothermal growth by heating the precursor liquid layer for hydrothermal growth.
Claims11
A method of preparing zinc oxide nanostructures using a liquid masking layer, comprising:
- preparing a substrate having a zinc oxide seed layer formed thereon;
- loading the substrate in a reactor in which a lower liquid masking layer, a precursor liquid layer for hydrothermal growth, and an upper liquid masking layer are disposed in order;
- and
- forming zinc oxide nanostructures in a pattern on the substrate through hydrothermal growth by heating the precursor liquid layer for hydrothermal growth.
Dependencies are inferred from the claim text.