Plasma Processing Device
AssigneeSamsung Electronics Co., Ltd.
InventorsHak-Young Kim, Ji-Myoung Lee, Ji-Hee Kim, Doug-Yong Sung, Kyeong-Seok Jeong, Seong-Chul Choi
Life of this patent
Estimating the term…
Abstract
A plasma processing device is provided. The plasma processing device includes a plate formed between a window covering a top portion of a chamber where plasma processing is performed and an antenna generating a magnetic field, and a fluid supply unit supplying a fluid for controlling temperatures of the window and the antenna, wherein the plate includes first and second regions supplied with the fluid, and the fluid supply unit independently controls the first and second regions.
Claims20
A plasma processing device comprising:
- a plate formed between a window covering a top portion of a chamber where plasma processing is performed and an antenna generating a magnetic field;
- and
- a fluid supply unit configured to supply a fluid that controls a temperature of the window and the antenna, wherein the plate comprises first and second regions configured to receive the fluid, and wherein the fluid supply unit is configured to independently control flow of the fluid in the first and second regions.
A plasma processing device comprising:
- a plate formed between a window covering a top portion of a chamber where plasma processing is performed and an antenna generating a magnetic field;
- a temperature sensor unit sensing a temperature of the window;
- and
- a fluid supply unit configured to supply a first fluid that lowers a temperature of the window and the antenna and a second fluid that raises the temperature of the window and configured to receive the temperature of the window from the temperature sensor unit,
- wherein the fluid supply unit supplies one of the first and second fluids to the plate according to the temperature of the window.
A plasma processing device, comprising:
- a chamber where plasma processing is performed;
- a window covering a top portion of the chamber;
- an antenna configured to generate a magnetic field within the chamber via the window;
- and
- a fluid supply unit configured to supply a fluid that controls a temperature of the window and the antenna, wherein the window comprises first and second regions configured to receive the fluid, and wherein the fluid supply unit is configured to independently control flow of the fluid in the first and second regions.
Dependencies are inferred from the claim text.