Defect Detection Using Structural Information

A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for detecting defects on a specimen based on structural information, wherein the computer-implemented method comprises:

• separating output generated by a detector of an inspection subsystem in an array area on a specimen into at least first and second segments of the output based on one or more characteristics of one or more structures in the array area such that the output in different segments has been generated in different locations in the array area in which the one or more structures having different values of the one or more characteristics are formed, wherein the inspection subsystem comprises at least an energy source and the detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate output responsive to the detected energy;
• and
• detecting defects on the specimen by applying one or more defect detection methods to the output based on whether the output is in the first segment or the second segment.

A computer-implemented method for detecting defects on a specimen based on structural information, comprising:

• separating output generated by a detector of an inspection subsystem in an array area on a specimen into at least first and second segments of the output based on one or more characteristics of one or more structures in the array area such that the output in the different segments has been generated in different locations in the array area in which the one or more structures having different values of the one or more characteristics are formed, wherein the inspection subsystem comprises at least an energy source and the detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate output responsive to the detected energy;
• and
• detecting defects on the specimen by applying one or more defect detection methods to the output based on whether the output is in the first segment or the second segment, wherein said separating and said detecting are performed by one or more computer systems.