Yttria based conductive plasma-resistant member and methods thereof
AssigneeKorea Institute of Machinery & Materials
InventorsHai Doo KIM, Jae Wook LEE, Ha Neul KIM, Jin Myung KIM, Young Jo PARK, Jae Woong KO
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Abstract
The present invention discloses a conductive plasma-resistant member including an yttrium oxide. The plasma-resistant member of the present invention includes an yttrium compound which includes a matrix phase consisting of yttrium oxides, and a conductive dispersed phase. According to the present invention, the present invention provides a semiconductor-grade yttria composite which may be used as a plasma-resistant member requiring conductivity like a focus ring.
Claims18
A plasma-resistant member comprising an yttrium compound, comprising:
- a matrix phase consisting of yttrium oxides;
- and
- a conductive dispersed phase.
A method of producing a plasma-resistant member comprising an yttrium compound, comprising:
- providing a powder mixture of an yttrium oxide and a conductive material;
- molding the powder mixture to produce a molded product;
- and
- sintering the molded product under a nitrogen atmosphere.
A method of producing a plasma-resistant member comprising an yttrium compound, comprising:
- molding a powder mixture of a yttrium oxide and a carbide or nitride of at least one metal selected from a group consisting of Ti, Zr and Hf to produce a molded product;
- calcining the molded product;
- and
- sintering the molded product under a nitrogen atmosphere.
Dependencies are inferred from the claim text.