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US 2016/0104128 A1Published application
Mobile device user interface for supporting service maintenance and tracking activities in semiconductor tool
AssigneeLam Research Corporation
InventorsSimon Gosselin, Vincent Wong, Ronald Ramnarine, Neal K. Newton, Mukesh Shah, Kerwin Hoversten, Bob Ahrens, Marco Mora, Roger Patrick
Life of this patent
Estimating the term…
Abstract
Integration of semiconductor tool maintenance operations on mobile devices enables technicians to more accurately perform semiconductor tool maintenance, and allows for more accurate collection and analysis of data so that maintenance procedures and resulting tool operations can be more repeatable, consistent and efficient.
Claims20
A method for conducting semiconductor tool maintenance and operation, the method comprising:
- (a) determining, via a portable electronic device, that a user is performing at least one action associated with maintenance on a semiconductor tool, wherein the maintenance includes at least a first task and a second task;
- (b) tracking, with the portable electronic device, a time spent on the maintenance, wherein the time spent on the maintenance includes at least a time spent on the first task and a time spent on the second task;
- (c) determining, with the portable electronic device, that the user is performing at least one action associated with the first task;
- (d) providing, responsive to (c), instructions associated with the first task to the user via the portable electronic device;
- (e) tracking, responsive to (c) and with the portable electronic device, the time spent on the first task;
- (f) determining, with the portable electronic device, that the user is performing at least one action associated with the second task;
- (g) providing, responsive to (f), instructions associated with the second task to the user via the portable electronic device;
- (h) tracking, responsive to (f) and with the portable electronic device, the time spent on the second task;
- and
- (i) outputting the time spent on the maintenance of the semiconductor tool, the time spent on the first task, and the time spent on the second task from the portable electronic device to an associated computing device.
7 more elements
An apparatus for semiconductor tool maintenance, the apparatus comprising:
- a display;
- a user input interface;
- a semiconductor maintenance time tracker;
- a first task time tracker;
- a second task time tracker;
- and
- a processor communicatively coupled to the display, the user input interface, the semiconductor maintenance time tracker, the first task time tracker, and the second task time tracker, the processor configured to operate the apparatus for:
- (a) determining, via the apparatus, that a user is performing at least one action associated with maintenance on a semiconductor tool, wherein the maintenance includes at least a first task and a second task;
- (b) tracking, with the apparatus, a time spent on the maintenance, wherein the time spent on the maintenance includes at least a time spent on the first task and a time spent on the second task;
- (c) determining, with the apparatus, that the user is performing at least one action associated with the first task;
- (d) providing, responsive to (c), instructions associated with the first task to the user via the apparatus;
- (e) tracking, responsive to (c) and with the apparatus, the time spent on the first task;
- (f) determining, with the apparatus, that the user is performing at least one action associated with the second task;
- (g) providing, responsive to (f), instructions associated with the second task to the user via the apparatus;
- (h) tracking, responsive to (f) and with the apparatus, the time spent on the second task;
- and,
- (i) outputting the time spent on the maintenance of the semiconductor tool, the time spent on the first task, and the time spent on the second task from the apparatus to an associated computing device.
14 more elements
A system for semiconductor tool maintenance, the system comprising:
- a semiconductor tool;
- a server device;
- and
- an associated portable electronic device for communicatively coupling with the semiconductor tool and the server device, the portable electronic device comprising a display, a user input interface, a semiconductor maintenance time tracker, a first task time tracker, a second task time tracker, and a processor communicatively coupled to the display, the user input interface, the semiconductor maintenance time tracker, the first task time tracker, and the second task time tracker, the processor configured to operate the apparatus for:
- (a) determining, via the apparatus, that a user is performing at least one action associated with maintenance on a semiconductor tool, wherein the maintenance includes at least a first task and a second task;
- (b) tracking, with the apparatus, a time spent on the maintenance, wherein the time spent on the maintenance includes at least a time spent on the first task and a time spent on the second task;
- (c) determining, with the apparatus, that the user is performing at least one action associated with the first task;
- (d) providing, responsive to (c), instructions associated with the first task to the user via the apparatus;
- (e) tracking, responsive to (c) and with the apparatus, the time spent on the first task;
- (f) determining, with the apparatus, that the user is performing at least one action associated with the second task;
- (g) providing, responsive to (f), instructions associated with the second task to the user via the apparatus;
- (h) tracking, responsive to (f) and with the apparatus, the time spent on the second task;
- and,
- (i) outputting the time spent on the maintenance of the semiconductor tool, the time spent on the first task, and the time spent on the second task from the apparatus to an associated computing device.
11 more elements
Dependencies are inferred from the claim text.