Display device and method of manufacturing the same
AssigneeSamsung Display Co., Ltd.
InventorsSangwook LEE, Chang Ok KIM, SungHoon YANG, Junmo IM
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Abstract
A display device includes a display part that displays an image, a touch part on the display part, the touch part including a first conductive layer on the display part, a lower inorganic layer on the first conductive layer, an upper inorganic layer covering the lower inorganic layer and a second conductive layer on the upper inorganic layer. The upper inorganic layer includes substantially a same material as the lower inorganic layer. The upper inorganic layer has a hydrogen atomic percent less than a hydrogen atomic percent of the lower inorganic layer.
Claims20
A display device, comprising:
- a display part that displays an image;
- and
- a touch part on the display part, the touch part including:
- a first conductive layer on the display part;
- a lower inorganic layer on the first conductive layer;
- an upper inorganic layer covering the lower inorganic layer;
- and
- a second conductive layer on the upper inorganic layer,
- wherein the upper inorganic layer includes substantially a same material as the lower inorganic layer, and
- the upper inorganic layer has a hydrogen atomic percent less than a hydrogen atomic percent of the lower inorganic layer.
A method of manufacturing a display device, the method comprising:
- providing a display panel;
- forming a first electrode layer on the display panel;
- forming an insulating layer including silicon nitride on the first electrode layer;
- and
- forming a second conductive layer on the insulating layer, forming the insulating layer including:
- supplying a first gas on the first conductive layer to form a lower insulating layer;
- and
- supplying a second gas on the lower insulating layer to form an upper insulating layer, and
- wherein the first gas includes silane, nitrogen, ammonia, and hydrogen, and the second gas includes silane, nitrogen, and hydrogen.
Dependencies are inferred from the claim text.