Gas sensor device with frame passageways and related methods
AssigneeStmicroelectronics Pte Ltd
InventorsYonggang JIN, Ravi SHANKAR
Life of this patent
Estimating the term…
Abstract
A gas sensor device may include a gas sensor integrated circuit (IC) having a gas sensing surface, and bond pads adjacent to the gas sensing surface, and a frame having gas passageways extending therethrough adjacent the gas sensing surface. The gas sensor device may include leads, each having a proximal end spaced from the frame and bonded to a respective bond pad, and a distal end extending downwardly from the proximal end, and encapsulation material filling the space between the proximal ends of the leads and the frame.
Claims25
A gas sensor device comprising:
- a gas sensor integrated circuit (IC) having a gas sensing surface, and a plurality of bond pads adjacent thereto;
- a frame having a plurality of gas passageways extending therethrough adjacent the gas sensing surface;
- a plurality of lead frame bodies, each lead frame body having
- a proximal end spaced from said frame, said proximal end being over and bonded to a respective bond pad, and
- a distal end extending downwardly from the proximal end;
- and
- encapsulation material filling a space between the proximal ends of said plurality of lead frame bodies and said frame.
A gas sensor device comprising:
- a gas sensor integrated circuit (IC) having a gas sensing surface, and a plurality of bond pads adjacent thereto;
- a frame having a plurality of gas passageways extending therethrough adjacent the gas sensing surface, said frame and the gas sensing surface being in spaced relation to define a gas sensing cavity therebetween;
- a plurality of lead frame bodies, each lead frame body having
- a proximal end spaced from said frame, said proximal end being over and bonded to a respective bond pad, and
- a distal end extending downwardly from the proximal end;
- an adhesive layer between said gas sensor IC and said plurality of lead frame bodies;
- and
- encapsulation material filling a space between the proximal ends of said plurality of lead frame bodies and said frame;
- said frame, said encapsulation material, and the proximal ends of said plurality of lead frame bodies being aligned to define an upper surface of the gas sensor device.
A method of making a gas sensor device comprising:
- forming a frame having a plurality of gas passageways extending therethrough, and forming a plurality of lead frame bodies, each lead frame body having
- a proximal end spaced from the frame, and
- a distal end extending downwardly from the proximal end;
- positioning a gas sensor integrated circuit (IC) having a gas sensing surface adjacent the plurality of gas passageways, and a plurality of bond pads adjacent thereto and bonded to a respective proximal end, the respective proximal end being over a respective bond pad;
- and
- forming encapsulation material to fill a space between the proximal ends of the plurality of lead frame bodies and the frame.
Dependencies are inferred from the claim text.