Integrated fluidic system for gas chromatography
AssigneeThe Regents of the University of Michigan
InventorsYogesh B. GIANCHANDANI, Yutao QIN
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AssigneeThe Regents of the University of Michigan
InventorsYogesh B. GIANCHANDANI, Yutao QIN
Estimating the term…
A method is presented for fabricating a fluidic system for a gas chromatograph. The method includes: microfabricating a portion of a fluidic system of a gas chromatograph on a substrate using a first mask; microfabricating a portion of the fluidic system of the gas chromatograph using a second mask; and microfabricating a portion of the fluidic system of the gas chromatograph using a third mask, such that the first mask, the second mask and the third mask are different from each other and the microfabricating of the fluidic system of the gas chromatograph is completed using only the first, second and third masks. A gas chromatograph wherein a microfabricated Knudsen pump is arranged to operate in a first direction to draw carrier gas into a preconcentrator and in a second direction to draw gas out of the preconcentrator.
A method for microfabricating a fluidic system for a gas chromatograph having at least three components, comprising:
A gas chromatograph, comprising:
A gas chromatograph, comprising:
A method for microfabricating a fluidic system for a gas chromatograph, comprising:
A method for microfabricating a fluidic system for a gas chromatograph, comprising:
Dependencies are inferred from the claim text.