US 2016/0103082 A1 · HYDROGEN GAS SENSOR WITH CONCENTRATION FUNCTION AND HYDROGEN GAS SENSOR PROBE USED IN SAME

Abstract

A hydrogen gas sensor element and a hydrogen gas concentration part which has, on a membrane thermally isolated from a substrate, a heater, a temperature sensor and a hydrogen gas absorbing substance are provided in the same microchamber. Hydrogen gas is released from the concentration part and highly concentrated due to heat applied by the heater, and the highly concentrated hydrogen gas is measured by the hydrogen gas sensor element. Because the hydrogen gas absorbing substance exhibits selectivity for hydrogen gas, there is no need for the hydrogen gas sensor element to exhibit selectivity for hydrogen gas. An airflow limiting part is provided in the exit/entrance opening of the microchamber, whereby dilution of hydrogen gas by the entrance of external airflow is prevented. Introduction of the gas to be investigated into the microchamber is performed at predetermined intervals using an introduction means such as a pump.

Claims15

Dependent claims

1-8. (canceled)

A hydrogen gas sensor comprising:

an airflow restriction part that is provided in a communicating hole, the airflow restriction part connecting between external gas which includes hydrogen gas and a chamber;
a concentration part that is configured to concentrate the hydrogen gas and that is provided in the chamber;
a hydrogen gas sensor element that is provided in the chamber;
a hydrogen absorber, a heater, and a temperature sensor that are provided in the concentration part;
and
an introduction member that is configured to introduce the external gas into the chamber, wherein
hydrogen in the hydrogen gas included in the external gas is absorbed by the concentration part,
the hydrogen that is absorbed in the concentration part is discharged into the chamber by heating the hydrogen,
hydrogen gas concentration of the hydrogen gas increases by the airflow restriction part,
the hydrogen gas sensor element detects information relating to the hydrogen gas concentration of the concentrated hydrogen gas in the chamber so as to output the information, and
the hydrogen gas concentration in the external gas is obtained based on predetermined calibration data.

8 more elements

Dependencies are inferred from the claim text.

Facts

Application

14/892,737Filed 22 May 2014

Priority

JP 2013-10937523 May 2013

Published

14 Apr 2016

Term ends

Not estimatedThe source records don’t support an estimate.

Classification7 codes

G01N 25/20
Investigating or analyzing materials by the use of thermal means: by investigating the development of heat, i.e. calorimetry, e.g. by measuring…
G01N 33/005
Specially adapted to detect a particular component: h2
G01N 25/4893
For a flowing, e.g. gas sample: by using a differential method
G01N 27/16
Of an electrically-heated body in dependence upon change of temperature: caused by burning or catalytic oxidation of surrounding material to be…

Hydrogen gas sensor with concentration function and hydrogen gas sensor probe used in same

Life of this patent

Hydrogen gas sensor with concentration function and hydrogen gas sensor probe used in same

Life of this patent

Abstract

Claims15