Method for inspecting sealability of vacuum chamber

Abstract

The present invention discloses a method for inspecting sealability of a vacuum chamber. The vacuum chamber has a closed site in which two sealing rings are arranged in such a way that the two sealing rings form therebetween a sealed compartment. The sealed compartment has a wall in which an evacuation hole is formed. The method for inspecting sealability of a vacuum chamber includes: connecting an evacuation valve through a pipe to the evacuation hole to form evacuation piping; mounting a pressure meter to the evacuation piping; opening the evacuation valve to proceed with evacuation of the sealed compartment and, during the evacuation process, monitoring the pressure meter; and determining sealability of the two sealing rings according to a reading of the pressure meter. The present invention allows for quick evacuation of the sealed compartment and to determine the sealability of the two sealing rings according to the pressure meter.

Dependencies are inferred from the claim text.