Capacitive pressure sensor
AssigneeHORIBA STEC, Co., Ltd.
InventorsSotaro KISHIDA, Takehisa HATAITA, Akira KUWAHARA
Life of this patent
Estimating the term…
Abstract
Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.
Claims3
A capacitive pressure sensor comprising:
- a diaphragm that deforms under pressure;
- an electrode member having an electrode face opposed to the diaphragm with a gap between the diaphragm and the electrode face;
- and
- a body having one end to which the diaphragm is joined, and accommodating at least a portion of the electrode member,
- wherein the electrode member includes:
- a measurement electrode provided in the body and having the electrode face;
- a signal extraction electrode fixed to the other end of the body, and extracts a signal from the measurement electrode;
- and
- a flexible connection member that electrically connects the measurement electrode and the signal extraction electrode, and
- the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.
Dependencies are inferred from the claim text.