System comprising a mechanical resonator and method therefor
AssigneeFreescale Semiconductor, Inc.
InventorsHUGUES BEAULATON, THIERRY CASSAGNES, LAURENT CORNIBERT, VOLKER WAHL
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Abstract
A system comprises a mechanical resonator; an analog circuit operably coupled to the mechanical resonator; the analog circuit arranged to receive a mechanical resonator measurement signal and to output a mechanical resonator actuation signal to the mechanical resonator; and a digital actuator operably coupled to the analog circuit and configured to provide a frequency sweep of signals to the analog circuit that induces movement of the mechanical resonator.
Claims20
A system comprising:
- a mechanical resonator;
- an analog circuit operably coupled to the mechanical resonator;
- the analog circuit arranged to receive a mechanical resonator measurement signal and to output a mechanical resonator actuation signal to the mechanical resonator;
- and
- a digital actuator operably coupled to the analog circuit and configured to provide a frequency sweep of signals to the analog circuit that induces movement of the mechanical resonator.
A method of generating an actuation signal for a mechanical resonator within an micro-electro-mechanical system (MEMS) device, the method comprising:
- turning on the MEMS device;
- providing a frequency sweep of signals to act as a kick start actuation signal for the MEMS device in response to the turn on;
- and
- inducing movement of the mechanical resonator in response to the frequency sweep of signals.
Dependencies are inferred from the claim text.