Rotation velocity sensor and method for sensing rotation velocity
AssigneeRichtek Technology Corporation
InventorsLupu Liao, Chiung-C. Lo, Ying-Che Lo
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AssigneeRichtek Technology Corporation
InventorsLupu Liao, Chiung-C. Lo, Ying-Che Lo
Estimating the term…
A rotation velocity sensor includes a driving unit, a proof mass, a rotation sensing element, a compensating unit, and a rotation sensing unit. The driving unit generates a vibration driving signal and a reference signal. The proof mass is driven by the vibration driving signal to vibrate in a first direction. The rotation sensing element senses a vibration of the proof mass to generate a charge signal which corresponds to a portion of the vibration of the proof mass in a second direction orthogonal to the first direction. The compensating unit generates a compensation signal according to the reference signal. The rotation sensing unit converts the charge signal to a voltage signal or a current signal, and compensates the voltage signal or the current signal according to the compensation signal to cancel a noise in the second direction.
A rotation velocity sensor, comprising:
A method for sensing a rotation velocity, comprising:
Dependencies are inferred from the claim text.