Method for producing single crystal, and method for producing silicon wafer
AssigneeSumco Techxiv Corporation
InventorsYasuhito NARUSHIMA, Toshimichi KUBOTA, Fukuo OGAWA, Masayuki UTO
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AssigneeSumco Techxiv Corporation
InventorsYasuhito NARUSHIMA, Toshimichi KUBOTA, Fukuo OGAWA, Masayuki UTO
Estimating the term…
A manufacturing method of a single crystal uses a single-crystal pull-up apparatus includes: adding the red phosphorus to the silicon melt so that a resistivity of the single crystal falls in a range from 0.7 mΩ·cm to 0.9 mΩ·cm; subjecting an evaluation silicon wafer obtained from the single crystal to a heat treatment in which the evaluation silicon wafer is heated at 1200 degrees C. for 30 seconds in a hydrogen atmosphere; and pull-up the single crystal while appropriately controlling a period for a temperature of the single crystal to be in a range of 570±70 degrees C. so that the number of pits generated on the evaluation silicon wafer becomes 0.1/cm2 or less.
A manufacturing method of a single crystal using a single-crystal pull-up apparatus comprising a chamber, a crucible disposed in the chamber and adapted to receive a dopant-added melt in which red phosphorus is added to a silicon melt, and a pull-up portion that is configured to pull up a seed crystal after the seed crystal is brought into contact with the dopant-added melt, the method comprising:
A manufacturing method of a silicon wafer using a single crystal obtained using a single-crystal pull-up apparatus comprising a chamber, a crucible disposed in the chamber and adapted to receive a dopant-added melt in which red phosphorus is added to a silicon melt, and a pull-up portion that is configured to pull up a seed crystal after the seed crystal is brought into contact with the dopant-added melt, the method comprising:
A single crystal manufactured using a silicon melt added with red phosphorus so that a resistivity of the silicon melt is in a range from 0.7 m∩·cm to 0.9 m∩·cm, the single crystal comprising:
Dependencies are inferred from the claim text.