Internally heated porous filter for defect reduction with liquid or solid precursors

A heated filter assembly for heating gas supplied to a substrate processing system, comprising:

• a housing defining a cavity, an inner surface and an outer surface;
• a filter element configured to filter the gas and including an inner surface and an outer surface, wherein the filter element is arranged inside the cavity of the housing with the outer surface of the filter element in a spaced relationship relative to the inner surface of the housing;
• and
• a heat transfer element that is arranged inside of the filter element and that includes:
• an outer surface;
• an inner cavity;
• a plurality of projections arranged on the outer surface of the heat transfer element in direct physical contact with the inner surface of the filter element;
• and
• a plurality of portions that are arranged on the outer surface of the heat transfer element, that are spaced from the inner surface of the filter element and that are located between the plurality of projections.