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US 2016/0101983 A1Published application
Method of preparing trichlorosilane
AssigneeHanwha Chemical Corporation
InventorsGil Ho KIM, Gui Ryong AHN, Won Ik LEE, Joon Hwan KIM, Kyu Hak PARK
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Abstract
This invention relates to a method of preparing trichlorosilane, which enables trichlorosilane to be obtained at improved yield using silicon having copper silicide uniformly formed thereon, by uniformly distributing and applying a copper compound on the surface of silicon and then performing heat treatment.
Claims11
A method of preparing trichlorosilane, comprising:
- forming a copper (Cu) compound coating layer on silicon (Si);
- heat treating the silicon having the copper compound coating layer formed thereon to a temperature equal to or higher than a melting temperature of the copper compound, thus forming copper silicide (Cu-silicide) on the silicon;
- and
- supplying silicon tetrachloride and hydrogen to the silicon having copper silicide formed thereon, so that hydrochlorination is carried out.
1 more element
Dependencies are inferred from the claim text.