Resonance Frequency Adjustment Module
AssigneeMurata Manufacturing Co., Ltd.
InventorsHidekazu Ono, Tsuyoshi OKAMI, Nobuaki TSUJI, Yuki UEYA
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Abstract
A resonance frequency adjustment module is disclosed forming a MEMS sensor for detecting an angular velocity. The resonance frequency adjustment module includes a movable electrode; a fixed electrode facing the movable electrode to form a capacitor; and an elastic body supporting the movable electrode so as to be displaceable in one direction. The movable electrode and the fixed electrode have surfaces facing each other to form a capacitor, and the surface can be inclined to a displacement direction. A region sandwiched between the movable electrode and the fixed electrode has a volume fixed region where the volume is not decreased by movement of the movable electrode.
Claims20
A resonance frequency adjustment module forming a MEMS sensor for detecting an angular velocity, the resonance frequency adjustment module comprising:
- a movable electrode having a first surface and a plurality of first projections protruding from the first surface;
- a fixed electrode having a second surface and a plurality of second projections protruding from the second surface toward the first surface and interposed between the plurality of first projections, respectively, where the second surface of the fixed electrode faces the first surface of the movable electrode to form a capacitor with the first surface;
- and
- an elastic body supporting the movable electrode such that the movable electrode is displaceable relative to the fixed electrode,
- wherein each of the first projections includes a base and an extending portion having a surface inclined relative to the first surface,
- wherein each of the second projections includes a surface parallel to the surface of the extending portion of an adjacent first projection, and
- wherein a fixed space is defined between the movable electrode and the fixed electrode and the fixed space has a volume that is fixed irrespective of displacement of the movable electrode.
A resonance frequency adjustment module forming a MEMS sensor for detecting an angular velocity, the resonance frequency adjustment module comprising:
- a movable electrode having a first surface and a plurality of projections protruding from the first surface;
- a fixed electrode having a plurality of polygon-shaped bodies each disposed between a pair of the plurality of projections of the movable electrode;
- and
- an elastic body supporting the movable electrode such that the movable electrode is displaceable relative to the fixed electrode,
- wherein each of the plurality of projections includes a base and an extending portion having at least one surface inclined relative to the first surface,
- wherein each of the plurality of polygon-shaped bodies has a first side surface facing and parallel to the at least one surface of the extending portion of a first projection of the respective pair of projections, and a second side surface facing and parallel to the at least one surface of the extending portion of a second projection of the respective pair of projections, and
- wherein a fixed space is defined between the movable electrode and the fixed electrode and the fixed space has a volume that is fixed irrespective of displacement of the movable electrode.
A resonance frequency adjustment module forming a MEMS sensor for detecting an angular velocity, the resonance frequency adjustment module comprising:
- a movable electrode having a first surface and a plurality of projections protruding from the first surface, where each of the plurality of projections includes a base and a plurality of first convex-shaped teeth arranged at regular intervals side by side in a direction in which the respective projection extends;
- a fixed electrode having a plurality of bodies each disposed between a pair of the plurality of projections of the movable electrode, where each of the plurality of bodies has a plurality of second convex-shaped teeth that face the first convex-shaped teeth of adjacent projections at a fixed distance;
- and
- an elastic body supporting the movable electrode such that the movable electrode is displaceable relative to the fixed electrode,
- wherein a fixed space is defined between the movable electrode and the fixed electrode and the fixed space has a volume that is fixed irrespective of displacement of the movable electrode.
Dependencies are inferred from the claim text.