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US 2016/0101974 A1Published application
Low-stress doped ultrananocrystalline diamond
AssigneeUchicago Argonne, LLC
InventorsAnirudha V. Sumant, Federico Buja, Willem Merlijn van Spengen
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Abstract
Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.
Claims22
A method of fabricating a device comprising:
- depositing a layer of a carbide-forming metal on a boron or nitrogen doped ultrananocrystalline diamond (B/N-UNCD);
- and
- tuning the internal stress properties of the device by controlling deposition thickness of the carbide forming metal.
A device comprising:
- a silicon base;
- an oxide layer;
- a conductive nitrogen doped ultrananocrystalline diamond (N-UNCD) layer of 3 microns to 4 microns;
- and
- a titanium carbide layer deposited on the N-UNCD layer.
2 more elements
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A nano/micro-electro mechanical (MEMS) device comprising:
- a non-conductive base;
- a laterally movable conductive thermal actuator disposed on the non-conductive base, the actuator comprising doped ultrananocrystalline diamond (UNCD);
- wherein the UNCD exhibits negligible in-plane stress.
Dependencies are inferred from the claim text.