US 2016/0101437 A1 · CMUT ASSEMBLY WITH ACOUSTIC WINDOW

Abstract

In some examples, a capacitive micromachined ultrasonic transducer (CMUT) apparatus includes one or more CMUTs formed on a CMUT substrate to have an operational direction facing away from the CMUT substrate. As one example, the one or more CMUTs may include a plurality of CMUT cells arranged in groups to form CMUT elements, and a plurality of the CMUT elements may be configured as an array on the CMUT substrate. An acoustic window is disposed over the one or more CMUTs and may contact an external medium. For instance, the acoustic window may be positioned to pass acoustic energy to or from the one or more CMUTs in the operational direction. A coupling medium may be disposed between the CMUTs and the acoustic window to couple acoustic energy between the one or more CMUTs and the acoustic window.

Claims20

Dependent claims

A method comprising:

forming one or more capacitive micromachined ultrasonic transducers (CMUTs) on a CMUT substrate, the one or more CMUTS formed to have an operational direction facing away from the CMUT substrate;
disposing a coupling medium over the one or more CMUTs and the CMUT substrate;
and
disposing an acoustic window over the coupling medium, the one or more CMUTs, and the CMUT substrate, wherein the coupling medium couples acoustic energy between the one or more CMUTs and the acoustic window.

1 more element

Dependencies are inferred from the claim text.

Cmut assembly with acoustic window

Life of this patent

Cmut assembly with acoustic window

Life of this patent

Abstract

Claims20