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US 2016/0099134 A1Published application
Arc evaporation coating source having a permanent magnet
AssigneePlansee SE
InventorsMATTHIAS PERL, PETER POLCIK, CONRAD POLZER, STEFAN SCHLICHTHERLE, GEORG STRAUSS
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Abstract
An arc evaporation coating source includes a target made of a coating material to be vapor-deposited, a ferromagnetic yoke for influencing the vapor deposition of the coating material to be vapor-deposited and at least one permanent-magnetic body for influencing the vapor deposition of the coating material to be vapor-deposited. The ferromagnetic yoke is disposed in contact with the target. The permanent-magnetic body is fastened to the target by the ferromagnetic yoke.
Claims11
1-10. (canceled)
An arc evaporation coating source, comprising:
- a target made of a coating material to be vapor-deposited;
- a ferromagnetic yoke for influencing a vapor deposition of said coating material to be vapor-deposited, said ferromagnetic yoke being disposed in contact with said target;
- and
- at least one permanent-magnetic body for influencing said vapor deposition of said coating material to be vapor-deposited, said permanent-magnet body being fastened to said target by said ferromagnetic yoke.
1 more element
Dependencies are inferred from the claim text.