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US 2016/0097974 A1Published application
Chemically amplified negative resist composition, photo-curable dry film, making method, patterning process, and electric/electronic part-protecting film
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsSatoshi Asai, Katsuya Takemura, Kyoko Soga
Life of this patent
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Abstract
A chemically amplified negative resist composition comprising a silicone structure-bearing polymer forms a film which can be readily patterned. The patterned film is tightly adherent to various substrates and suited as protective film on electric/electronic parts because of improved alkali resistance and reliability.
Claims13
A chemically amplified negative resist composition comprising
- (A) a silicone structure-bearing polymer comprising recurring units of the general formula (1) and having a weight average molecular weight of 3,000 to 500,000,
- wherein R1 to R4 are each independently a monovalent C1-C8 hydrocarbon group, m is an integer of 1 to 100, a, b, c and d are each independently 0 or a positive number, a+b>0, and a+b+c+d=1, X is a divalent organic group having the general formula (2):
- wherein W is a divalent organic group selected from the following:
- n is 0 or 1, R5 and R6 are each independently a C1-C4 alkyl or alkoxy group, k is independently 0, 1 or 2, Y is a divalent organic group having the general formula (3):
- wherein V is a divalent organic group selected from the following:
- p is 0 or 1, R7 and R8 are each independently a C1-C4 alkyl or alkoxy group, h is independently 0, 1 or 2,
- (B) at least one compound selected from polyhydric phenols having at least three hydroxyl groups,
- (C) a photoacid generator which is decomposed to generate an acid upon exposure to radiation of wavelength 190 to 500 nm, and
- (D) a solvent.
6 more elements
Dependencies are inferred from the claim text.