Silicone skeleton-containing polymer compound and method for producing same, chemically amplified negative resist composition, photo-curable dry film and method for producing same, patterning process, layered product, and substrate

A silicone skeleton-containing polymer compound comprising a repeating unit shown by the general formula (24) and having a weight average molecular weight of 3,000 to 500,000,

• wherein R21 to R24 may be the same or different and represent a monovalent organic group having 1 to 15 carbon atoms and optionally containing an oxygen atom;
• R18 and R19 may be the same or different and represent a monovalent organic group having 1 to 28 carbon atoms and optionally containing an oxygen atom;
• m′ is an integer of 0 to 100;
• “o” is an integer of 0 to 100;
• c′, d′, e′, and f′ are each 0 or a positive number, and a′, b′, g′ and h′ are each a positive number, provided that a′+b′+c′+d′+e′+f′+g′+h′=1;
• X′ is a divalent organic group shown by the general formula (25) or the general formula (26);
• Y is a divalent organic group shown by the general formula (3);
• W is a divalent organic group shown by the general formula (4);
• and U is a divalent organic group shown by the general formula (5),
• wherein the dotted line represents a bond;
• R5 and R6 each represent an alkyl group or alkoxy group having 1 to 4 carbon atoms and may be the same or different;
• and “x” is 0, 1, or 2
• wherein V represents a divalent organic group selected from any of
• the dotted line represents a bond;
• “p” is 0 or 1;
• R7 and R8 each represent an alkyl group or alkoxy group having 1 to 4 carbon atoms and may be the same or different;
• and “y” is 0, 1, or 2;
• wherein the dotted line represents a bond;
• T represents an alkylene group having 1 to 10 carbon atoms or a divalent aromatic group;
• and R9 represents a hydrogen atom or a methyl group;
• wherein the dotted line represents a bond;
• T and R9 have the same meanings as defined above;
• and R10 represents a monovalent carboxyl-containing organic group.