Device and Method for Micro-Electro-Mechanical-System Photonic Switch
AssigneeHuawei Technologies Co., Ltd.
InventorAlan Frank Graves
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Abstract
In one embodiment, a method of controlling a micro-electro-mechanical-system (MEMS) photonic switch includes applying a voltage to an electrode of an initial mirror of a first mirror array of the MEMS photonic switch and illuminating a control beam. The method also includes reflecting the control beam off the initial mirror to form a control beam spot on a second mirror array of the MEMS photonic switch and detecting an initial location of the control beam spot to produce an initial optical response. Additionally, the method includes adjusting the voltage in accordance with the initial optical response while the control beam spot has a nonzero velocity.
Claims29
A method of controlling a micro-electro-mechanical-system (MEMS) photonic switch, the method comprising:
- applying a voltage to a deflection electrode of an initial mirror of a first mirror array of the MEMS photonic switch;
- illuminating a control beam;
- reflecting the control beam off the initial mirror to form a control beam spot on a second mirror array of the MEMS photonic switch;
- detecting an initial location of the control beam spot to produce an initial optical response;
- and
- adjusting the voltage in accordance with the initial optical response while the control beam spot has a nonzero velocity.
A control system for a micro-electro-mechanical-system (MEMS) photonic switch, the control system comprising:
- a first processor;
- a first computer readable storage medium storing programming for execution by the processor, the programming including instructions to
- receive a first plurality of responses from a first plurality of photodiodes on a surface of a first mirror array of the MEMS photonic switch,
- determine a present center of a first control beam spot on the first mirror array in accordance with the first plurality of responses;
- determine a present velocity of the first control beam spot in accordance with the present center of the first control beam spot and a previous center of the first control beam spot,
- determine a present acceleration of the first control beam spot in accordance with the present center of the first control beam spot and the previous center of the first control beam spot,
- determine a first correction to a first mirror of a second mirror array of the MEMS photonic switch in accordance with the present center of the first control beam spot, the present velocity of the first control beam spot, and the present acceleration of the first control beam spot, and
- adjust the first mirror in accordance with the first correction;
- and
- a first shift register configured to store the present center of the first control beam spot and the previous center of the first control beam spot.
A method of controlling a micro-electro-mechanical-system (MEMS) photonic switch, the method comprising:
- applying an acceleration voltage to an acceleration electrode of a mirror of a mirror array of the MEMS photonic switch;
- removing the acceleration voltage;
- and
- applying a deceleration voltage to a deceleration electrode of the mirror of the mirror array of the MEMS photonic switch after removing the acceleration voltage, wherein the deceleration electrode is opposite the acceleration electrode.
Dependencies are inferred from the claim text.