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US 2016/0097791 A1Published application
MEMS Accelerometer with Z Axis Anchor Tracking
AssigneeAnalog Devices, Inc.
InventorXin Zhang
Life of this patent
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Abstract
In some exemplary embodiments, a MEMS accelerometer includes a device wafer having a proof mass and a plurality of tracking anchor points attached to a substrate. Each tracking anchor is configured to deflect in response to asymmetrical deformation in the substrate, and transfer mechanical forces generated in response to the deflection to tilt the proof mass in a direction of the deformation.
Claims20
A MEMS accelerometer comprising:
- a device wafer having a proof mass and a plurality of tracking anchors attached to a substrate, wherein each tracking anchor is configured to (1) deflect in response to asymmetrical deformation in the substrate, and (2) transfer mechanical forces generated in response to the deflection to tilt the proof mass in a direction of the deformation.
A MEMS accelerometer comprising:
- a substrate;
- a proof mass attached to the substrate by an anchor;
- torsional springs that couple the proof mass to a frame;
- a T-shaped beam connected to the frame, wherein a first end of the T-shaped beam is connected to a first tracking anchor attached to the substrate and a second end of the T-shaped beam is connected to a second tracking anchor attached to the substrate;
- wherein the first and second tracking anchors deflect in response to asymmetrical deformation in the substrate and transfer mechanical forces through the T-shaped beam, frame, and torsional springs to tilt the proof mass in a direction of the deformation.
2 more elements
A MEMS accelerometer comprising:
- means for supporting a proof mass;
- and
- means, attached to a substrate and the means for supporting the proof mass, for (1) deflecting in response to asymmetrical deformation in the substrate, and (2) transferring mechanical forces generated in response to the deflection to tilt the proof mass in a direction of the deformation.
Dependencies are inferred from the claim text.