Plasma diagnostic method and apparatus using raman scattering
AssigneeUnist Academy-Industry Research Corporation
InventorsMin Sup HUR, Young Kuk KIM, Myung Hoon JO
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Abstract
A plasma diagnostic method and apparatus using Raman scattering are disclosed herein. The plasma diagnostic method using Raman scattering includes focusing a laser beam, controlled such that the laser beam enters a preset polarized state, into a gas within a vacuum chamber, generating plasma in response to the focusing of the laser beam, magnetizing the generated plasma by inducing an electromagnetic field using a radio frequency (RF) power source mounted on the vacuum chamber and configured to provide an RF signal, and performing plasma diagnostic parameter-based monitoring based on scattered light generated via the laser beam incident into the magnetized plasma.
Claims13
A plasma diagnostic method using Raman scattering, comprising:
- focusing a laser beam, controlled such that the laser beam enters a preset polarized state, into a gas within a vacuum chamber;
- generating plasma in response to the focusing of the laser beam;
- magnetizing the generated plasma by inducing an electromagnetic field using a radio frequency (RF) power source mounted on the vacuum chamber and configured to provide an RF signal;
- and
- performing plasma diagnostic parameter-based monitoring based on scattered light generated via the laser beam incident into the magnetized plasma.
A plasma diagnostic apparatus using Raman scattering, comprising:
- a vacuum chamber;
- a gas adjustment unit configured to supply a gas into the vacuum chamber;
- a laser generation unit configured to generate a laser beam having a preset or higher level of energy, to control the generated laser beam so that the laser beam enters a preset polarized state, and to radiate the laser beam into the vacuum chamber;
- a plasma generation unit configured to generate plasma in response to the laser beam radiated into the vacuum chamber and focused on the gas;
- and
- a plasma diagnosis control unit configured to magnetize the plasma, generated by the plasma generation unit, by inducing an electromagnetic field using an RF power source, and to perform plasma diagnostic parameter-based monitoring based on scattered light generated by the laser beam incident into the magnetized plasma.
Dependencies are inferred from the claim text.