Pressure array sensor module and manufacturing method thereof
AssigneeIndustrial Technology Research Institute
InventorsChang-Yi Chen, Jui-Yiao Su, Yan-Chen Liu, Chang-Ho Liou
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AssigneeIndustrial Technology Research Institute
InventorsChang-Yi Chen, Jui-Yiao Su, Yan-Chen Liu, Chang-Ho Liou
Estimating the term…
A pressure array sensor module, comprising an array electrode board, a plurality of pressure sensing elements, at least one first conductive structure and at least one second conductive structure is provided. The array electrode board comprises a substrate and an electrode array disposed on the substrate and having a first electrode pattern and a second electrode pattern. Each pressure sensing element is disposed at a sensing position on the array electrode board, and comprises a top electrode layer, a bottom electrode layer and at least one pressure sensing layer disposed between the top electrode layer and the bottom electrode layer. The top electrode layer has a first lead. The bottom electrode layer has a second lead. The first conductive structure electrically connects the first lead and the corresponding first electrode pattern. The second conductive structure electrically connects the second lead and the corresponding second electrode pattern.
A pressure array sensor module, comprising:
A manufacturing method of pressure array sensor module, comprising:
Dependencies are inferred from the claim text.