Combined leg structure of micro bridge unit of focal plane array
AssigneeWuxi Aleader Intelligent Technology Co., LTD
InventorsTao Wang, Liangzhong Wei, Wanglong Zhu, Yan Liu
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AssigneeWuxi Aleader Intelligent Technology Co., LTD
InventorsTao Wang, Liangzhong Wei, Wanglong Zhu, Yan Liu
Estimating the term…
A combined leg structure of a micro bridge unit of a focal plane array adopts a conductive polymer film or a doped conductive polymer film to serve as an extraction electrode in the micro bridge unit of the focal plane array, which contacts a vanadium oxide thermosensitive film or a doped vanadium oxide thermosensitive film of a bridge surface layer, so as to electrically connect the thermosensitive film of the micro bridge unit with a read-out circuit. The combined leg structure includes three layers: respectively an upper SiNx film layer, a lower SiNx film layer and a middle layer of the conductive polymer film or the doped conductive polymer film. The present invention adopts the conductive polymer film or the doped conductive polymer film having a low thermal conductivity to serve as an electrode material. A bridge leg absorption structure is arranged in the combined leg structure.
A combined leg structure for a micro bridge unit of a focal plane array, wherein said combined leg structure for the micro bridge unit adopts a conductive polymer film or a doped conductive polymer to serve as an extraction electrode in the micro bridge unit of the focal plane array, for contacting a vanadium oxide thermosensitive film or a doped vanadium oxide thermosensitive film on a bridge surface layer, so as to electrically connect the vanadium oxide thermosensitive film or the doped vanadium oxide thermosensitive film with a read-out circuit of the focal plane array.
Dependencies are inferred from the claim text.