Mems sensor module, vibration driving module, and mems sensor

A MEMS sensor comprising a MEMS sensor module including:

• a movable electrode which translates back and forth along an axis of movement;
• first and second stationary electrodes facing first and second portions of the movable electrode, respectively;
• a plurality of first projections extending from the movable electrode toward the first stationary electrode;
• a plurality of second projections extending from the movable electrode toward the second stationary electrode;
• a plurality of third projections extending from the first stationary electrode toward the first portion of the movable electrode such that each of the third projections partially overlaps a respective one of the second projections;
• and
• a plurality of fourth projections extending from the second stationary electrode toward the second portion of the movable electrode such that each of the fourth projections partially overlaps a respective one of the second projections;
• the first and third plurality of projections, on the one hand, and the second and fourth plurality of projections, on the other, partially overlapping one another in opposite directions.