Cryopump
AssigneeSumitomo Heavy Industries, Ltd.
InventorKen Oikawa
Life of this patent
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Abstract
A cryopump includes: a cryopump vessel that defines an inlet; a refrigerator including a first stage and a second stage housed in the cryopump vessel, the second stage being cooled to a lower temperature than that of the first stage; a first cryopanel thermally connected to the first stage and surrounded by the cryopump vessel; and a second cryopanel thermally connected to the second stage and surrounded by the first cryopanel. The first cryopanel includes a plate member having an inlet aperture at the inlet. The inlet aperture is formed in the plate member such that a ratio of a conductance of the plate member with respect to an aperture conductance of the inlet is 6% or less.
Claims10
A cryopump comprising:
- a cryopump vessel that defines a cryopump inlet;
- a refrigerator comprising a first stage and a second stage housed in the cryopump vessel, the second stage being cooled to a lower temperature than that of the first stage;
- a first cryopanel thermally connected to the first stage and surrounded by the cryopump vessel;
- and
- a second cryopanel thermally connected to the second stage and surrounded by the first cryopanel,
- wherein the first cryopanel comprises an inlet cryopanel having an inlet aperture at the cryopump inlet,
- wherein the inlet aperture is formed in the inlet cryopanel such that a ratio of a conductance of the inlet cryopanel with respect to an aperture conductance of the cryopump inlet is 6% or less.
Dependencies are inferred from the claim text.