Nano-aperture fabrication using template guided thermal dewetting
AssigneeAgency for Science, Technology and Research
InventorsJoel Kwang Wei Yang, Ying Min Wang, Mohamed Asbahi, Yong-Wei Zhang, Liangxing Lu, Bharathi Madurai Srinivasan
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Abstract
A method for fabrication of metal film with nanoapertures is provided. The method includes the steps of providing a nanopatterned template including a plurality of nanostructures, depositing of the metal film onto the nanopatterned template, and thermally induced dewetting of the metal film to define the nanoapertures in the metal film by diffusion and reflow of the metal film.
Claims19
A method for fabrication of metal film with nanoapertures comprising:
- providing a nanopatterned template comprising a plurality of nano structures;
- depositing the metal film onto the nanopatterned template;
- and
- thermally induced dewetting of the metal film to define the nanoapertures in the metal film by diffusion and reflow of the metal film.
A method for simulating nanoaperture fabrication in metal film, the method comprising predicting fabrication yield for the nanoaperture fabrication in the metal film by complementarily performing a phase-field simulation method of the nanoaperture fabrication and an energetic analysis of the nanoaperture fabrication.
Dependencies are inferred from the claim text.