Method of Producing a Freestanding Thin Film of Nano-Crystalline Carbon
AssigneesFEI Company, Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
InventorsBart Buijsse, Radostin Stoyanov Danev, Kasim Sader
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Abstract
A freestanding thin film of nano-crystalline graphite is described, as well as a method of producing a freestanding thin film of nano-crystalline graphite including: providing a freestanding thin film of amorphous carbon, heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and allowing the freestanding thin film to cool down, as a result of which a freestanding thin film of nano-crystalline graphite is formed. The films can be used, for example, as phase plates in a Transmission Electron Microscope.
Claims17
A method of producing a freestanding thin film of nano-crystalline graphite, the method comprising the steps of:
- providing a freestanding thin film of amorphous carbon,
- locally heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum;
- and
- allowing the freestanding thin film to cool down, as a result of which a freestanding thin film of nano-crystalline graphite is formed.
A component for a transmission electron microscope, the component comprising or made of a freestanding thin film of nano-crystalline graphite.
Dependencies are inferred from the claim text.