Mems die and methods with multiple-pressure sealing
AssigneeWispry, Inc.
InventorsArthur S. Morris, III, Dana DeReus
Life of this patent
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Abstract
The present subject matter relates to systems and methods for sealing one or more MEMS devices within an encapsulated cavity. A first material layer can be positioned on a substrate, the first material layer comprising a first cavity and a second cavity that each have one or more openings out of the first material layer. At least the first cavity can be exposed to a first atmosphere and sealed while it is exposed to the first atmosphere while not sealing the second cavity. The second cavity can then be exposed to a second atmosphere that is different than the first atmosphere, and the second cavity can be sealed while it is exposed to the second atmosphere.
Claims13
A micro-electro-mechanical systems (MEMS) die comprising:
- a substrate;
- a first material layer positioned on the substrate, the first material layer comprising a first cavity and a second cavity that each have one or more openings out of the first material layer;
- and
- a lid layer positioned on the first material layer, the lid layer enclosing the first cavity and the second cavity, the first cavity defining a first atmosphere therein, and the second cavity defining a second atmosphere therein that is different than the first atmosphere.
A micro-electro-mechanical systems (MEMS) die comprising:
- a substrate;
- a first material layer positioned on the substrate, the first material layer comprising a first cavity and a second cavity that each have one or more openings out of the first material layer;
- a lid layer positioned on the first material layer, the lid layer comprising first vent holes in communication with the first cavity and second vent holes in communication with the second cavity;
- a first sealing layer deposited on the lid layer and sealing the first vent holes;
- and
- a second sealing layer deposited on the lid layer and the first sealing layer, the second sealing layer sealing the second vent holes.
Dependencies are inferred from the claim text.