Transfer apparatus, transfer system, and transfer method

A transfer apparatus for loading/unloading a work into/from a plurality of processing apparatuses, comprising:

• a main body being able to move in a horizontal direction;
• an arm portion pivotally provided with respect to the main body;
• a hand portion pivotally provided with respect to the arm portion, and configured to grip the work;
• a control unit configured to horizontally swing the arm portion and move the main body in order for the hand portion to linearly move the work, when the hand portion facing the processing apparatus loads/unloads the work into/from the processing apparatus;
• and
• a lifting mechanism supporting the arm portion so as to move the arm portion up and down,
• wherein the arm portion is connected to a pivot of the main body at one end side thereof and to the hand portion at the other end side thereof,
• the hand portion has a main body of the hand portion connected to the arm portion and a chuck portion provided to the main body of the hand portion,
• the chuck portion is configured to grip the work and pivots around an axis being parallel to a direction for loading/unloading a work into/from a processing apparatus, and
• the control unit is configured to further control the up and down movement of the lifting mechanism and a pivoting of the chuck portion in order to load/unload the work into/from each of the plurality of the processing apparatuses.

A transfer system for loading/unloading a work into/from a plurality of processing apparatuses, comprising:

• a transfer path arranged along a plurality of loading/unloading ports of the processing apparatuses;
• and
• a transfer apparatus configured to load/unload the work into/from the processing apparatus, wherein the transfer apparatus comprises:
• a main body being able to move in a horizontal direction along the transfer path;
• an arm portion pivotally provided with respect to the main body;
• a hand portion pivotally provided with respect to the arm portion, and configured to grip the work;
• a first control unit configured to horizontally swing the arm portion and move the main body in order for the hand portion to linearly move the work, when the hand portion facing the processing apparatus loads/unloads the work into/from the processing apparatus;
• and
• a second control unit configured to control the hand portion and the first control unit based on a signal from the processing apparatus.

A transfer method of loading/unloading a work into/from a processing apparatus by using a transfer apparatus, wherein

• the transfer apparatus comprises a main body being able to move in a horizontal direction, an arm portion pivotally provided with respect to the main body, and a hand portion pivotally provided with respect to the arm portion and configured to grip the work,
• the transfer method comprises:
• a moving of the transfer apparatus gripping the work to the processing apparatus;
• and
• an operating for the main body, the arm portion, and the hand portion in cooperation with each other in order for the hand portion to linearly move the work, when the hand portion facing the processing apparatus loads/unloads the work into/from the processing apparatus, and
• based on the operating, the transfer method performs:
• a swinging of the arm portion horizontally;
• a moving of the main body in the horizontal direction;
• and
• a swinging of the hand portion such that one side surface of the work faces the processing apparatus while moving.

A transfer method of loading/unloading a work into/from a plurality of processing apparatuses by using a transfer apparatus, wherein

• the transfer apparatus comprises a main body being able to move in a horizontal direction, an arm portion pivotally provided with respect to the main body, and a hand portion pivotally provided with respect to the arm portion and configured to grip the work,
• the transfer method comprises:
• a moving of the transfer apparatus gripping the work to any one of the processing apparatuses;
• and
• an operating for the main body, the arm portion, and the hand portion in cooperation with each other in order for the hand portion to linearly move the work with respect to each processing apparatus, when the hand portion facing the processing apparatus loads/unloads the work into/from any one of the processing apparatuses, and
• based on the operating, the transfer method performs:
• a swinging of the arm portion horizontally;
• a moving of the main body in the horizontal direction;
• and
• a swinging of the hand portion such that one side surface of the work faces the processing apparatus while moving.