A substrate holding and rotating device, comprising:
- a turntable rotatable about a vertical rotation axis;
- a rotative drive unit which rotates the turntable;
- a holding member provided on the turntable such that the holding member rotates together with the turntable, the holding member extending upwardly from the turntable, the holding member being movable between a holding position at which the holding member horizontally holds a substrate in a state in which the turntable and the substrate are spaced in a vertical direction and a retracted position to which the holding member is retracted from the holding position;
- a protection disk including an opening which surrounds a whole circumference of the holding member, the protection disk disposed between the turntable and a substrate holding position at which the substrate is held by the holding member, the protection disk being vertically movable relative to the turntable between a lower position and an adjacent position above the lower position and close to a lower surface of the substrate held by the holding member, the protection disk attached to the turntable so as to rotate about the rotation axis together with the turntable, the protection disk being larger than the substrate held by the holding member;
- a magnetic levitation mechanism including a first magnet attached to the protection disk, a second magnet which has an annular shape coaxial about the rotation axis and generates a repulsive force with respect to the first magnet, a first support member which non-rotatably supports the second magnet, and a first relative movement mechanism which moves the first support member and the turntable relative to each other so as to change a distance between the first magnet and the second magnet, the magnetic levitation mechanism being configured to levitate the protection disk from the turntable by the repulsive force generated between the first magnet and the second magnet;
- and
- a magnetic drive mechanism including a first magnetic member attached to the holding member, a second magnetic member which has an annular shape coaxial about the rotation axis and generates a magnetic force with respect to the first magnetic member, a second support member which non-rotatably supports the second magnetic member, and a second relative movement mechanism which is separate from the first relative movement mechanism and moves the second support member and the turntable relative to each other so as to change a distance between the first magnetic member and the second magnetic member, the magnetic drive mechanism being configured to hold the holding member at the holding position by the magnetic force generated between the first magnetic member and the second magnetic member.