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US 2016/0096185 A1Published application
Thin film fabricating apparatus and manufacturing method of organic light emitting device using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsHamamoto NOBUO, Miyazaki HIROSHI
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Abstract
A thin film fabricating apparatus includes: an electrode bath which contains a thin film-forming material; a plurality of needle electrodes disposed in the electrode bath; a plurality of ring electrodes disposed on the electrode bath at positions corresponding to the needle electrodes; and a substrate stand disposed opposite to the needle electrodes and the ring electrodes, where the substrate stand holds the substrate, on which a thin film is to be formed.
Claims18
An thin film fabricating apparatus comprising:
- an electrode bath which contains a thin film-forming material;
- a plurality of needle electrodes disposed in the electrode bath;
- a plurality of ring electrodes disposed on the electrode bath at positions corresponding the needle electrodes;
- and
- a substrate stand disposed opposite to the needle electrodes and the cycle electrodes, wherein the substrate stand holds a substrate on which a thin film is to be formed.
2 more elements
Dependencies are inferred from the claim text.