Method, device and system for enrichment of nf3 gas
AssigneeOci Company Ltd.
InventorsDong-Won LIM, Jong-Eun SHIN, Youn-Joong KIM, Hyun-Jun KIM, Sang-Yup LEE
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Abstract
Disclosed is a method for enrichment of NF3 gas, comprising: (a) feeding a gas mixture containing a low concentration of NF3 gas and impurities; and (b) passing the feed gas mixture through a non-porous membrane module, wherein an enriched NF3 gas mixture passing through the non-porous membrane module and an unenriched NF3 gas mixture failing to pass through the non-porous membrane module are separated depending on the differences in the kinetic diameters of the individual gases.
Claims15
A method for enrichment of NF3 gas, comprising:
- (a) feeding a gas mixture containing a low concentration of NF3 gas and impurities;
- and (b) passing the feed gas mixture through a non-porous membrane module, wherein an enriched NF3 gas mixture passing through the non-porous membrane module and an unenriched NF3 gas mixture failing to pass through the non-porous membrane module are separated depending on the differences in the kinetic diameters of the individual gases.
A device for enrichment of NF3 comprising a controller for controlling the supply of a gas mixture containing a low concentration of NF3 gas and impurities;
- and a non-porous membrane module for enrichment of NF3 gas.
Dependencies are inferred from the claim text.