Circuit board formation using organic substrates
AssigneeInternational Business Machines Corporation
InventorsHiroyuki Mori, Hirokazu Noma, Keishi Okamoto
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AssigneeInternational Business Machines Corporation
InventorsHiroyuki Mori, Hirokazu Noma, Keishi Okamoto
Estimating the term…
A method of forming a circuit board includes forming a conductive pattern on a substrate; forming a first negative resist on the substrate after formation of the conductive pattern; partially exposing the first negative resist on the surface of the conductive pattern to form a first via exposure portion; forming a second negative resist on the substrate after formation of the first via exposure portion; partially exposing the second negative resist on the first via exposure portion to form a second via exposure portion larger than the first via exposure portion; developing the first negative resist and the second negative resist after formation of the second via exposure portion to form a via opening reaching the conductive pattern; and filling the via opening with a conductive material.
A method of forming a circuit board, the method comprising:
Dependencies are inferred from the claim text.