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US 2016/0080879 A1Published application
System and Method for a Transducer
AssigneeInfineon Technologies AG
InventorsAndreas Wiesbauer, Christian Jenkner, Ulrich Krumbein, Marc Füldner
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Abstract
According to an embodiment, a transducer system includes a transducing element and a symmetry detection circuit. The transducing element includes a signal plate, a first sensing plate, and a second sensing plate. The symmetry detection circuit is coupled to a differential output of the transducer element and is configured to output an error signal based on asymmetry in the differential output.
Claims27
A transducer system comprising:
- a transducing element comprising a signal plate, a first sensing plate, and a second sensing plate;
- and
- a symmetry detection circuit coupled to a differential output of the transducer element, the symmetry detection circuit configured to output an error signal based on asymmetry in the differential output.
A method of operating a transducer system, the method comprising:
- generating a differential output signal at a differential capacitive transducer based on a sensed input signal;
- generating a symmetry signal based on the differential output signal;
- comparing the symmetry signal to an error condition characteristic;
- and
- repairing the differential capacitive transducer if the comparing indicates an error condition.
2 more elements
A microphone system comprising:
- a dual backplate MEMS (microelectromechanical system) microphone comprising:
- a first backplate,
- a second backplate,
- a membrane formed between the first backplate and the second backplate,
- a first output terminal coupled to the first backplate, and
- a second output terminal coupled to the second backplate;
- and
- an interface circuit comprising:
- a first amplifier coupled to the first output terminal,
- a second amplifier coupled to the second output terminal,
- a symmetry detection circuit coupled to outputs of the first amplifier and the second amplifier and comprising a symmetry signal terminal,
- a comparator coupled to the symmetry signal terminal and an asymmetry threshold input and comprising a release enable output, and
- a release circuit coupled to the release enable output and the membrane, the release circuit configured to provide a release control signal to the membrane based on signals received from the release enable output.
10 more elements
Dependencies are inferred from the claim text.