Integrated mems and ic systems and related methods
AssigneeTrustees of Boston University
InventorsJosef-Stefan Wenzler, Tyler Dunn, Shyamsunder Erramilli, Pritiraj Mohanty
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Abstract
An integrated MEMS and IC system (MEMSIC), as well as related methods, are described herein. According to some embodiments, a mechanical resonating structure is coupled to an electrical circuit (e.g., field-effect transistor). For example, the mechanical resonating structure may be coupled to a gate of a transistor. In some cases, the mechanical resonating structure and electrical circuit may be fabricated on the same substrate (e.g., Silicon (Si) and/or Silicon-on-Insulator (SOI)) and may be proximate to one another.
Claims26
An integrated circuit, comprising:
- an electrical circuit;
- and
- a mechanical resonating structure having a resonating element including at least one dimension less than 100 microns,
- wherein the mechanical resonating structure is coupled to the electrical circuit and the mechanical resonating structure and the electrical circuit are integrated on a first substrate.
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15-16. (canceled)
An integrated circuit, comprising:
- an electrical circuit;
- and
- a mechanical resonating structure having a resonating element, the mechanical resonating structure designed to provide an output signal at a frequency of greater than 1 MHz,
- wherein the mechanical resonating structure is coupled to the electrical circuit and the mechanical resonating structure and the electrical circuit are integrated on a first substrate.
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A device, comprising:
- a mechanical resonating structure;
- a first electric circuit comprising at least one transistor, at least one gate of the at least one transistor being coupled to the mechanical resonating structure;
- and
- wherein the mechanical resonating structure and the first electric circuit are integrated on a first substrate.
27-39. (canceled)
Dependencies are inferred from the claim text.