Energy harvesting device, method for manufacturing the same, and wireless device including the same

A wireless device, comprising:

• a housing;
• a printed circuit board disposed in the housing;
• a plurality of semiconductor chips mounted on the printed circuit board;
• and
• an energy harvesting device supplying a power voltage to the semiconductor chips,
• wherein the energy harvesting device comprises:
• a support body;
• a first cantilever connected to the support body;
• and
• an electricity generation layer on the first cantilever,
• wherein the first cantilever has a thickness that gradually increases in a direction that is away from the support body.

A method for manufacturing an energy harvesting device, the method comprising:

• providing a first cantilever to a support body;
• and
• forming an electricity generation layer on the first cantilever,
• wherein the support body comprises:
• a first base below the first cantilever;
• and
• a support formed on one side of the first base, the support being connected to the first cantilever,
• wherein the first cantilever has a thickness that gradually increases in a direction that is away from the support.