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US 2016/0079884 A1Published application
Electrostatic actuator and method for producing the same
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsNicolas LANGE, Frank WIPPERMANN
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Abstract
An electrostatic actuator having a stationary electrode and a fixedly cantilevered bender is described, wherein the bender includes a cantilever electrode disposed opposite to the stationary electrode in an overlapping area and being deflectable in the direction of the stationary electrode.
Claims17
Electrostatic actuator, comprising:
- a stationary electrode;
- a fixedly cantilevered bender,
- wherein the bender comprises a cantilever with a cantilever electrode disposed opposite to the stationary electrode in an overlapping area;
- wherein the cantilever comprises, in an idle state, a first end disposed in the plane of the bender and a second end deflected out of a plane where the bender is disposed in the direction of the stationary electrode, to effect, when applying an electric field, a deformation of the cantilever electrode or the bender.
1 more element
Method for producing an electrostatic actuator, comprising:
- disposing a stationary electrode;
- disposing a fixedly cantilevered bender;
- wherein the bender comprises a cantilever with a cantilever electrode, which is disposed opposite to the stationary electrode in an overlapping area;
- wherein the cantilever comprises, in an idle state, a first end disposed in the plane of the bender and a second end deflected out of a plane where the bender is disposed in the direction of the stationary electrode, to effect, when applying an electric field, a deformation of the cantilever electrode or the bender.
1 more element
Dependencies are inferred from the claim text.