US 2016/0079534 A1Published application

Deposition source and organic layer deposition apparatus including the same

AssigneeSamsung Display Co., Ltd.

InventorsYoung-Mook Choi, Hee-Cheol Kang, Chae-Woong Kim, Mu-Hyun Kim, Dong-Kyu Lee

Life of this patent

Estimating the term…

Loading patent…

Abstract

A deposition source and an organic layer deposition apparatus that may be simply applied to the manufacture of large-sized display apparatuses on a mass scale and may prevent or substantially prevent deposition source nozzles from being blocked during deposition of a deposition material, thereby improving manufacturing yield and deposition efficiency. A deposition source includes a first deposition source including a plurality of first deposition source nozzles, and a second deposition source including a plurality of second deposition source nozzles wherein the plurality of first deposition source nozzles and the plurality of second deposition source nozzles are tilted toward each other.

Claims35

Dependent claims

A method of manufacturing an organic light-emitting display apparatus with a deposition source, the method comprising:

arranging a substrate to face the deposition source;
and
discharging a deposition material from the deposition source onto the substrate;
wherein the deposition source comprises:
a first deposition source and a second deposition source arranged along a first direction;
a first deposition source nozzle unit at a side of the first deposition source and comprising a plurality of first deposition source nozzles arranged in the first direction;
a second deposition source nozzle unit at a side of the second deposition source and comprising a plurality of second deposition source nozzles arranged in the first direction;
a pair of first protruding reflectors arranged at opposite sides of the plurality of first deposition source nozzles, wherein the plurality of first deposition source nozzles are between the first protruding reflectors;
and
a pair of second protruding reflectors arranged at opposite sides of the plurality of second deposition source nozzles, wherein the plurality of second deposition source nozzles are between the second protruding reflectors,
wherein first deposition source nozzles of the plurality of first deposition source nozzles and second deposition source nozzles of the plurality of second deposition source nozzles are arranged in a same row along the first direction, and
wherein the plurality of first deposition source nozzles and the plurality of second deposition source nozzles are tilted toward each other.

9 more elements

A method for manufacturing an organic light-emitting display apparatus by using an organic layer deposition apparatus for forming a thin film on a substrate, the method comprising:

arranging the substrate to face the organic layer deposition apparatus;
and
discharging a deposition material by using the organic layer deposition apparatus onto the substrate;
wherein the organic layer deposition apparatus comprises:
a deposition source for discharging a deposition material;
a deposition source nozzle unit at a side of the deposition source and comprising a plurality of deposition source nozzles arranged in a first direction;
and
a patterning slit sheet opposite the deposition source nozzle unit and having a plurality of patterning slits arranged in a second direction perpendicular to the first direction,
wherein the substrate is movable relative to the organic layer deposition apparatus in the first direction for performing deposition,
wherein the deposition source comprises a first deposition source and a second deposition source for discharging different materials, and
wherein the deposition source nozzle unit comprises:
a first deposition source nozzle unit at a side of the first deposition source and comprising a plurality of first deposition source nozzles arranged in the first direction;
and
a second deposition source nozzle unit at a side of the second deposition source and comprising a plurality of second deposition source nozzles arranged in the first direction,
wherein first deposition source nozzles of the plurality of first deposition source nozzles and second deposition source nozzles of the plurality of second deposition source nozzles are arranged in a same row along the first direction, and
wherein the plurality of first deposition source nozzles and the plurality of second deposition source nozzles are tilted at a predetermined angle.

13 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/946,686Filed 19 Nov 2015
Priority: KR 10-2011-000315512 Jan 2011
Published: 17 Mar 2016
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

C23C 14/12
Characterised by the coating material: organic material
C23C 14/243
Vacuum evaporation: crucibles for source material
H10K 71/13
Using liquid deposition, e.g. spin coating: using printing techniques, e.g. ink-jet printing or screen printing
H10K 71/231
Changing the shape of the active layer in the devices, e.g. patterning: by etching of existing layers

Family

Application13/328,524Continuation · filed 16 Dec 2011
Application14/946,686Continuation
US 2012/0174865 A1Published application
US 9,748,483 B2Related patent
US 2016/0079534 A1This patent

From the US filing history. Foreign family members aren’t listed.