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US 2016/0079524 A1Published application
Electronic device and method for fabricating the same
AssigneeSK hynix Inc.
InventorsKwan-Woo Do, Ki-Seon Park, Ga-Young Ha, Gil-Jae Park
Life of this patent
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Abstract
An electronic device includes a semiconductor memory that includes: a variable resistance element formed over a substrate; and a carbon-containing aluminum nitride layer formed on sidewalls and in an upper portion of the variable resistance element.
Claims20
An electronic device comprising a semiconductor memory that includes:
- a substrate;
- a variable resistance element formed over the substrate;
- and
- a carbon-containing layer formed over the variable resistance element and including carbon that gathers oxygen.
1 more element
A method for fabricating an electronic device including a semiconductor memory, comprising:
- forming a variable resistance element over a substrate to have different resistance states for storing data;
- and
- forming a carbon-containing layer over the variable resistance element to have an sufficient amount of carbon to gather oxygen against oxidation of the variable resistance element.
Dependencies are inferred from the claim text.