Back to results
US 2016/0079513 A1Published application
Doped piezoelectric resonator
AssigneeAnalog Devices, Inc.
InventorFlorian Thalmayr
Life of this patent
Estimating the term…
Abstract
Mechanical resonators including doped piezoelectric active layers are described. The piezoelectric active layer(s) of the mechanical resonator may be doped with a dopant type and concentration suitable to increase the electromechanical coupling coefficient of the active layer. The increase in electromechanical coupling coefficient may all for improved performance and smaller size mechanical resonators than feasible without using the doping.
Claims15
A device, comprising:
- a doped piezoelectric resonator comprising a doped piezoelectric active layer formed of a first material and having a first area, the doped piezoelectric resonator having a motional resistance;
- and
- an electrical circuit coupled to the doped piezoelectric resonator,
- wherein the piezoelectric active layer comprises a non-isotropically implanted dopant, the dopant representing less than 50% of the concentration of the first material, and
- wherein the motional resistance of the doped piezoelectric resonator is approximately the same as a motional resistance of a piezoelectric resonator with an active layer surface area between two to five times greater than the first area and lacking the dopant.
2 more elements
A method of manufacturing a resonator, comprising:
- forming a piezoelectric active layer;
- doping the piezoelectric active layer with a dopant to a concentration of less than 50% of the active layer using a non-isotropic implantation;
- and
- forming an interdigitated electrode on the piezoelectric active layer.
1 more element
A method, comprising:
- generating, with an electrical circuit having an impedance, an electrical input signal;
- providing the electrical input signal to a doped piezoelectric resonator having a motional resistance substantially approximately matching the impedance;
- and
- generating a resonance signal with the doped piezoelectric resonator.
1 more element
Dependencies are inferred from the claim text.